SC Layer & Dielectrics Patterning

Layer Stack

Wafer-Scale Superconducting Layers

iQnite provides wafer-scale 2D superconducting fabrication for quantum devices and microwave circuits. Our platform supports superconducting base-layer materials including Al, Nb, Ta, and TiN, with TiN kinetic inductance available up to 60 pH/sq for compact, high-impedance circuit designs.

Integrated dielectric films

Al₂O₃, SiO₂, and HfO₂ support

Low-temperature Al₂O₃ and SiO₂ deposition

Temperature-sensitive device integration

Fabrication Flow

From Surface Prep to Patterned Devices

Supports CPW resonators, parallel-plate capacitors, quantum amplifiers, and planar microwave circuits.

Surface Cleaning

Prepare wafer surfaces for reliable superconducting film formation and downstream patterning.

Thin-Film Deposition

Deposit superconducting base layers and integrated dielectrics for quantum and microwave circuit fabrication.

Lithography

Pattern device features through photolithography and electron-beam lithography.

ICP-RIE Dry Etching

Transfer patterns with high-quality dry etching for superconducting device structures.